½è¿ÇÉÏÊÐ £¿ÖйúMEMS´«¸ÐÆ÷ÁìÏÈÕßÎùî £¿Æ¼¼ÊÕ¹ºÉÏÊй«Ë¾°²³µ¼ì²âµÄ¹ÉȨ ÐÂÎųƻªÎªÐû²¼Ð¾Æ¬ÐͺŴú±í¹ú²úоƬ¹©Ó¦Á´ÒÑʵÏÖÈ«Á´Â·×ÔÖ÷¿É¿Ø ¸ßʢϵ÷ÃÀÕ®ÊÕÒæÂÊÕ¹Íû ÁÏ10ÄêÆÚÊÕÒæÂÊÄêµ×ʱÔÚ4.20% ÖÐÊÓ½ðÇÅÐû²¼ÖÐÆÚÒµ¼¨ ¹É¶«Ó¦Õ¼ÒçÀû3294.8ÍòԪͬ±ÈÔöÌí10% Å£ÊÐÈ·ÈÏ £¿ÈÚ×ÊÓà¶î´´Óâ10Äêиߣ¡È¯ÉÌÕðµ´ÐîÁ¦£¬A¹É¶¥Á÷ȯÉÌETF£¨512000£©½ü3ÈÕÎü½ð2.39ÒÚÔª ǰհȫÇò¹¤ÒµÔ籨£ºÉ¨µØ»úеÈ˹«Ë¾×·ÃÙ¹ÙÐûÔì³µ »ª¶û½ÖÉúÒâÔ±´óÐж¯£¡´óÐͿƼ¼¹ÉÈ«Ïß±Àµø£¡±¬·¢ÁËʲô £¿ ÃÀ¹úÏûºÄÕßÐÅÐĽµÖÁÈý¸öÔµ͵㠾­¼ÃÔ¶¾°Ô¤ÆÚת÷ö 1503ÒÚÓªÊÕ±³ºó£¬¼ªÏé¸É³ÉÁËÒ»¼þ±È׬Ǯ¸üÖ÷ÒªµÄÊÂ ÌØÀÊÆÕÖ®×Ó¼ÓÈëºó£¬Ð¡ÐÍͶ×ÊÒøÐÐÊÕÈ뼤Ôö